SVM offers a wide variety of films processing solutions. We have long term experience depositing single layer films or complex film stacks. Our deposition capabilities include thermal processing, LPCVD, PECVD, PVD, electroplating and evaporation or can provide custom films processing solutions to your specific requirements.
Below is a list of SVM’s most common films:
- Thermal Oxide
- CVD Oxide
- Low k: Black Diamond®, Coral®, Spin On
- Thick Oxide
- Particle Sensitive Oxide
- Low Particle Teos
- Silicon Carbide (SiC)
- BPSG, PSG, USG
- Polysilicon (Doped and Undoped)
- Amorphous Silicon
- Photoresist: I-line, 248nm DUV, 193nm Thick Photoresist
- Oxynitride (SiON)
- LPCVD Nitride
- PECVD Nitride
- Low Stress Nitride
- Diamond-Like Carbon (DLC)
- Metals: PVD, CVD, Electroplated, Evaporated, Al, Ta, Ti, TiN, TiW, TaN, WN, Cr, Cu, Al-Cu, Ni, Ru, SiC, SiCN, A-Si, Pd, Co, NiSi, TiO2, Pt, Ag, Au, etc.
Please CONTACT SVM for further information on SVM’s films processing solutions or to discuss your current requirements.