125 mm
SVM carries a full line of 125mm wafers. Please see below a SEMI standard specification for prime and test grade wafers. Every customer’s specification is unique and SVM can supply wafers that meet your exact specifications.
If you do not see the specification you require, please CONTACT SVM to speak with a member of our experienced and knowledgeable sales staff.
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Diameter
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125 +/- 0.5 mm
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125 +/- 0.2 mm
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Type / Dopant
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P/Boron
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P/Boron
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Orientation
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<100> +/- 1º
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<100> +/- 1º
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Grade
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Test
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Prime
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Resistivity
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1 - 100 Ω-cm
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10 - 30 Ω-cm
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Radial Resisivity Gradient
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—
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As Specified
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Oxygen
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—
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As Specified
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Carbon
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—
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As Specified
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Metals
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< 5 x E10 atoms/cm2
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< 5 x E10 atoms/cm2
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Thickness
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625 +/- 25 μm
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625 +/- 20 μm
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TTV
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<= 10 μm
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<= 5 μm
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GTIR
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Bow / Warp
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<= 50 μm
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<= 40 μm
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Site Flatness (STIR)
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—
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As Specified
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Flats
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1 or 2 SEMI Standard
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1 or 2 SEMI Standard
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Particle Count
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<= 50 @ >= 0.2 μm
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<= 30 @ >= 0.2 μm
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Polished
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Single Side Polished or Double Side Polished
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Single Side Polished or Double Side Polished
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Etched
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Single Side Polished or Double Side Polished
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Single Side Polished or Double Side Polished
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* N type wafers available
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