300 mm (12″) wafers were introduced in 1995. Over the last few years, we have seen a tremendous increase in 300 mm usage. Nearly all of the major chip manufacturers have already or have plans to build 300 mm fabs and many equipment manufacturers are busy producing new tools to accomodate 12″ wafers. All 300 mm wafers are double-side polished and have a notch identical to the notch found on 200 mm wafers. There are many different grades of 300 mm wafers and SVM is happy to be able to accommodate a very wide variety of customers.

If you do not see the specification you are looking for, please CONTACT SVM to speak with a member of our experienced and knowledgeable sales staff.

300 +/- 0.5 mm
Diameter 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm P+300 +/- 0.5 mm P+300 +/- 0.5 mm P+300 +/- 0.5 mm
Type / Dopant P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron
Orientation {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º
Growth Method Cz Cz Cz Cz Cz Cz Cz Cz Cz
Resistivity 1 – 30 Ω-cm 1 – 30 Ω-cm 1 – 30 Ω-cm 1 – 100 Ω-cm 1 – 100 Ω-cm 1 – 100 Ω-cm 0.005 – 0.02 Ω-cm 0.005 – 0.02 Ω-cm 0.005 – 0.02 Ω-cm
Radial Resistivity Gradient (RRG) <= 10% <= 10%
Oxygen Concentration <= 30 ppma <= 30 ppma
Carbon Concentration <= 1 ppma <= 1 ppma
Surface Metals <= 1xE10 <= 1xE10
Thickness 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm
TTV <= 2 μm <= 2 μm <= 2 μm <= 2 μm <= 2 μm <= 2 μm <= 2 μm
GBIR <= 5 μm <= 5 μm
Site Flatness (STIR) < 0.25 μm < 0.25 μm <= 0.13 μm
Bow/Warp <= 40 μm <= 40 μm <= 40 μm
Front Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Back Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Particle Count <= 50@ >= 0.09 μm <= 50@ >= 0.12 μm <= 50@ >= 0.16 μm <= 30@ >= 0.2 μm <= 100@ >= 0.2 μm <= 50@ >= 0.12 μm <= 50@ >= 0.16 μm <= 200@ >= 0.2 μm
Notch SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard
Silicon Wafers Non-Silicon Wafers
Wafer Services Lithography and Custom Films