SVM carries a full line of 76mm wafers. Please see below a SEMI standard specification for test grade wafers. Every customer’s specification is unique and SVM can supply wafers that meet your exact specifications.

If you do not see the specification you require, please CONTACT SVM to speak with a member of our experienced and knowledgeable sales staff.

Diameter 76.2 +/- 0.63 mm
Type / Dopant P/Boron
Orientation <100>+/- 1º
Resistivity 1 – 100 Ω-cm
Radial Resisivity Gradient
Oxygen
Carbon
Metals < 5 x E10 atoms/cm2
Thickness 381 +/- 50 μm
TTV <= 10 μm
GTIR
Bow / Warp <= 50 μm
Flats 1 or 2 SEMI Standard
Particle Count <= 50 @ >= 0.3 μm
Polished Single Side Polished or Double Side Polished
Etched Single Side Polished or Double Side Polished
*N type wafers available

 

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