Double Side Polished Wafers

SVM’s product line includes both single side polished (SSP) and double side polished (DSP) wafer substrates. Double side polished wafers are typically required in semiconductor, MEMS, and other applications where wafers with tightly controlled flatness characteristics are required. They are also needed for double side patterning and device manufacturing projects.

SVM carries a large inventory of double side polished wafers in all wafer diameters ranging from 50mm to 300mm. If your specification is not available in inventory SVM can custom manufacture wafers to your unique specifications. Double Side polished wafers are available in silicon, glass and other materials commonly used in the semiconductor industry. 
    
Below are examples of SVM standard products: 

                Silicon Wafer                                                             Silicon Wafer
                Diameter: 100mm                                                      Diameter: 200mm
                Type/dopant: N or P                                                   Type/dopant: N or P
                Orientation: <100>                                                     Orientation: <100>
                Resistivity: 0-100 ohm-cm                                           Resistivity: 0-100 ohm-cm
                Thickness: 525 +/-20um                                             Thickness: 725 +/-20um
                TTV: <8um                                                                TTV: <5um
                STIR: available upon request                                       STIR: <2um
                Flats: 1 or 2/ SEMI standard                                       Notch: SEMI standard
                Double Side Polished                                                 Double Side Polished

All 300mm silicon wafers are double side polished. SVM offers site flatness measurements down to <0.05um or greater, site size 26mmx 8mm, 100% PUA. 

Please CONTACT SVM for further information on Double Side Polished Wafers or to discuss your current requirements.