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150mmN/Phos675 +/-25{100}10 to 20<=101 FlatEtched<=10@>=0.2SV012Standard
150mmP/Boron675 +/-25{100}0.01-0.02<=51 FlatEtched<=20@>=0.2SV013Standard
150mmP/Boron675 +/-25{100}10 to 20<=5NotchEtched<=20@>=0.2SV014Standard
150mmP/Boron675 +/-25{100}10 to 20<=81 FlatEtched<=20@>=0.2SV015Standard
150mmP/Boron625 +/-25{100}1 to 50<=51 JeidaEtched<=20@>=0.2SV016Standard

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