300mm silicon wafers were introduced in 1995. Over the last several years, we have seen a tremendous increase in 300mm (12″) usage. Nearly all of the major chip manufacturers have already, or have plans to build 300mm fabrications and many equipment manufacturers are busy producing new tools to accommodate 12″ wafers. All 300mm wafers are double-side polished and have a notch identical to the notch found on 200mm wafers. There are many different grades of 300mm wafers, and SVM is happy to be able to accommodate a very wide variety of customers.

If you do not see the specification you are looking for or would like to place an order, please CONTACT SVM to speak with a member of our experienced and knowledgeable sales staff.

SVM Sample 300mm Silicon Wafers:

300 +/- 0.5 mm
Diameter 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm P+300 +/- 0.5 mm P+300 +/- 0.5 mm P+300 +/- 0.5 mm
Type / Dopant P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron
Orientation {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º
Growth Method Cz Cz Cz Cz Cz Cz Cz Cz Cz
Resistivity 1 – 30 Ω-cm 1 – 30 Ω-cm 1 – 30 Ω-cm 1 – 100 Ω-cm 1 – 100 Ω-cm 1 – 100 Ω-cm 0.005 – 0.02 Ω-cm 0.005 – 0.02 Ω-cm 0.005 – 0.02 Ω-cm
Radial Resistivity Gradient (RRG) <= 10% <= 10%
Oxygen Concentration <= 30 ppma <= 30 ppma
Carbon Concentration <= 1 ppma <= 1 ppma
Surface Metals <= 1xE10 <= 1xE10
Thickness 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm 750 – 800 μm
TTV <= 2 μm <= 2 μm <= 2 μm <= 2 μm <= 2 μm <= 2 μm <= 2 μm
GBIR <= 5 μm <= 5 μm
Site Flatness (STIR) < 0.25 μm < 0.25 μm <= 0.13 μm
Bow/Warp <= 40 μm <= 40 μm <= 40 μm
Front Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Back Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Particle Count <= 50@ >= 0.09 μm <= 50@ >= 0.12 μm <= 50@ >= 0.16 μm <= 30@ >= 0.2 μm <= 100@ >= 0.2 μm <= 50@ >= 0.12 μm <= 50@ >= 0.16 μm <= 200@ >= 0.2 μm
Notch SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard

 

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