300mm Wafers

300mm silicon wafers were introduced to the industry in 1995. Over the last several years, there has been a tremendous increase in 300mm (12″) wafer usage. Nearly all of the major chip manufacturers have already, or have plans to build 300mm fabrications and many equipment manufacturers are busy producing new tools to accommodate 12″ wafers. All 300mm wafers are double-side polished and have a notch identical to the notch found on 200mm wafers. There are many different grades of 300mm wafers, and SVM is happy to be able to accommodate a very wide variety of customers.

If your project’s requirements are outside the specifications listed below, please contact SVM to speak with a member of our team and we will gladly check our multi-million dollar inventory for wafers that will fit your projects requirements. If we do not have anything available we will custom manufacture wafers to meet your project’s exact requirements. For these orders, it may require a minimum order quantity greater than our standard of 25 wafers (1 cassette).

SVM 300mm Silicon Wafer Specifications:

Diameter 300 +/- 0.5 mm
Type/Dopant P/B, N/Ph, N/As, N/Sb, Intrinsic
Orientation* <100>+/- 1º
Resistivity <1 to >1,000 Ω-cm
Radial Resisivity Gradient ≤ 10%
Oxygen ≤ 30 ppma
Carbon ≤ 1 ppma
Metals < 5 x E10 atoms/cm2
Thickness 775 +/- 25μm
TTV ≤ 5μm
GBIR  ≤ 5μm
Bow/Warp ≤ 40μm
Site Flatness (STIR) < 0.25μm
Notch SEMI Standard
Particle Count ≤ 50 @ ≥ 0.2μm
Front Surface Polished
Back Surface Polished

*Non SEMI Standard orientations such as <110> rotated notch, and <111> are often kept in stock and available upon request. If your requirements are not available, we can custom manufacture wafers to meet your exact orientation requirements.


If you do not see the specification you are looking for or would like to request a quote, please CONTACT SVM to speak with a member of our experienced and knowledgeable sales staff or visit our ONLINE INVENTORY.


 

Silicon Wafers Non-Silicon Wafers
Wafer Services Lithography and Custom Films