300mm Wafers

300mm silicon wafers were introduced to the industry in 1995. Over the last several years, there has been a tremendous increase in 300mm (12″) usage. Nearly all of the major chip manufacturers have already, or have plans to build 300mm fabrications and many equipment manufacturers are busy producing new tools to accommodate 12″ wafers. All 300mm wafers are double-side polished and have a notch identical to the notch found on 200mm wafers. There are many different grades of 300mm wafers, and SVM is happy to be able to accommodate a very wide variety of customers.

SVM Sample 300mm Silicon Wafer Specifications:

300 +/- 0.5 mm
Diameter 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm 300 +/- 0.5 mm P+300 +/- 0.5 mm P+300 +/- 0.5 mm P+300 +/- 0.5 mm
Type / Dopant P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron P/Boron
Orientation {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º {100} +/- 1º
Growth Method Cz Cz Cz Cz Cz Cz Cz Cz Cz
Resistivity 1 – 30 Ω-cm 1 – 30 Ω-cm 1 – 30 Ω-cm 1 – 100 Ω-cm 1 – 100 Ω-cm 1 – 100 Ω-cm 0.005 – 0.02 Ω-cm 0.005 – 0.02 Ω-cm 0.005 – 0.02 Ω-cm
Radial Resistivity Gradient (RRG) ≤ 10% ≤ 10%
Oxygen Concentration ≤ 30 ppma ≤ 30 ppma
Carbon Concentration ≤ 1 ppma ≤ 1 ppma
Surface Metals ≤ 1xE10 ≤ 1xE10
Thickness 750 – 800μm 750 – 800μm 750 – 800μm 750 – 800μm 750 – 800μm 750 – 800μm 750 – 800μm 750 – 800μm 750 – 800μm
TTV ≤ 2μm ≤ 2μm ≤ 2μm ≤ 2μm ≤ 2μm ≤ 2μm ≤ 2μm
GBIR ≤ 5μm ≤ 5μm
Site Flatness (STIR) < 0.25μm < 0.25μm ≤ 0.13μm
Bow/Warp ≤ 40 μm ≤ 40 μm ≤ 40 μm
Front Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Back Surface Polished Polished Polished Polished Polished Polished Polished Polished Polished
Particle Count ≤50 @ ≥0.09μm ≤50 @ ≥0.12μm ≤50 @ ≥0.16μm ≤30 @ ≥0.2μm ≤100 @ ≥0.2μm ≤50 @ ≥0.12μm ≤50 @ ≥0.16μm ≤200 @ ≥0.2μm
Notch SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard SEMI Standard

If you do not see the specification you are looking for or would like to request a quote, please CONTACT SVM to speak with a member of our experienced and knowledgeable sales staff or visit our ONLINE INVENTORY.


 

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